First was a phone interview for 30 minutes with Student Program Manager which goes over just the basics of your qualifications and resume and if they feel a good match is there, you will be invited for an onsite(I had gone to Connecticut for onsite). They pay for the complete travel and hotel expenses and also reimburse later for additional expenses like meals, taxis etc. On the day of onsite interview, you will be interviewed by 3-5 people whom you will be working with mostly. The first person to receive you will be the hiring manager in most cases.My interview went really well with the first one except for one point where I just forgot the answer that i knew and I reacted childishly(That is what I think went wrong). He would just ask you to code on a piece of paper and ask questions about the basic C. Then, the next round was with the same person with whom I had interviewed on phone. He was good and sweet. that interview wasn't technical and more of behavioral. he also took me on a tour of their work site there.(P.S.: remember, ASML is not primarily a software company but a hardware based semi-conductor company so you can't carve out a great software career there in years. This is purely my opinion). After that you will have a third round of interview where again questions related to coding and compiling of code will be asked. Overall was a good experience. Compensation for the intern position was fairly low as compared to the fact that the position was in such an expensive area.

Applied online, submitted with CV and motivation letter. Got vitual interview with HireVue, just prepare some regular questions about yourself and recorded a video, then got interview with two team members for one hour, asking about Java and backend stuff. Got the offer after a week.